SRS
CIS series – CIS Gas Analyzers
Overview
With better than 1 ppm detection limit, direct sampling at mTorr pressure, and a user-friendly Windows software package, the CIS systems will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the point of use, high-vacuum residual gas analysis, and process equipment leak checking are some of the areas where these systems will prove indispensable.
Key Features
- 100, 200, and 300 amu systems
- 1 ppm detection
- 10 mTorr max. operating pressure
- 1 x 10-12 Torr detection limit
- RGA Windows software
- Multi-head operation
- RGA and CIS mode
