SRS
PPR series – Process Monitoring Systems
Overview
The PPR Process Monitoring System is designed for in-line process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure.
Key Features
- 0.01, 0.1, 1.0 or 10 Torr inlet pressure
- 3 × 10-5 Torr-L/s flow rate
- 2 second response time (0.1 Torr)
- 120, 220 or 320 amu systems
- 6 orders of magnitude dynamic range
- RGA Windows software
