SRS
RGA100 series – Residual Gas Analyzer
Overview
The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA’s provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.
Key Features
- 100, 200 and 300 amu systems
- Better than 1 amu resolution
- 6 orders of magnitude dynamic
- range in a single scan
- 5 x 10-14 Torr detection limit
- RGA Windows software
- RS-232 & Ethernet interfaces
