SRS
RGA120 series – Residual Gas Analyzer
Overview
The new 120, 220 and 320 amu residual gas analyzers from SRS offer increased mass range, better performance, and new capabilities like built-in analog I/O. Building on the previous RGA100 series, SRS continues to offer unmatched value with the RGA120 series. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.
Key Features
- 120, 220 and 320 amu systems
- Built-in I/O ports, relay & GPIO
- Easy peak tuning
- 5 x 10-14 Torr detection limit
- New RGASoft Windows software
- Hybrid electrometer for improved baseline sensitivity
- USB, RS-232 and Ethernet interfaces


